Precision Machining for Semiconductor Inspection & Metrology Equipment Components
Where Nanometer-Level Stability Starts with Micron-Level Machining
In modern semiconductor fabs, inspection and metrology equipment ensures every wafer meets atomic-scale accuracy. From CD-SEM to optical profilers and defect review systems, the structural and mechanical components of these machines must deliver zero vibration, extreme flatness, and dimensional repeatability — often under vacuum or anti-vibration isolation platforms.
For over 20 years, our CNC factory in China has served global semiconductor inspection tool manufacturers with precision frames, optical mounts, stage assemblies, and low-deformation structures — machined and measured down to micron tolerances.
✔ What Makes Inspection Equipment Components So Challenging?
These parts demand not just precision — but consistency and purity:
- Ultra-flat surfaces: Bases and stages often require flatness < 0.005mm across >500mm dimensions.
- No vibration / deformation: Frame structures must maintain geometric integrity under load, thermal drift, or vacuum.
- Material damping & stability: Specific alloys or granite-hybrid parts are used to suppress motion or vibration.
- Cleanroom-grade finish: Surfaces must be burr-free, particle-free, and contamination-free for Class 10/100 environments.
- Precision assembly tolerance: Multiple parts must align in micron-accurate positioning (optics, sensor beds, X/Y stages).
✔ Materials We Work With — For Opto-Mechanical Perfection
| Material | Typical Application | Machining Highlights |
|---|---|---|
| Tooling-grade Aluminum (MIC6, 6061-T6) | Base plates, frame structures | Stress-relieved + precision milling, flatness < 0.01mm |
| Granite (with inserts) | Optical stage beds | Surface grinding + steel thread inserts + lapping |
| Cast Iron & Polymer Concrete | Damping bases, heavy metrology platforms | Low-vibration, epoxy-fill machining + dynamic balancing |
| Titanium / Invar | Thermal-invariant structures | 5-axis control + heat compensation machining |
| SUS304 / 316 | Vacuum enclosures, optics frames | CNC + electropolish + vacuum testing |
✔ Advanced CNC Capabilities for Nanometer-Critical Parts
Our factory operates equipment specifically calibrated for ultra-flat, low-deformation parts:
- CNC Gantry Milling (1.5m travel) – Ideal for large aluminum optical plates and machine frames
- Double-sided Surface Grinding – Ensures parallelism and flatness < 0.005mm
- Coordinate Jig Boring – For ultra-precise hole-to-hole repeatability in assemblies
- Vibration Dampening Inserts & Balancing – For cast bases, platforms, and isolation frames
- Clean Assembly Room – For subassembly-level delivery (mechanical + optical mounts)
Metrology Equipment Includes:
- Zeiss CMM with scanning probe for <±1μm 3D verification
- Surface flatness laser interferometry (up to 1000mm)
- Roundness/cylindricity gauge (Mitutoyo RA-2200)
- High-magnification vision inspection for edge & thread quality
✔ Delivered Projects for Global Inspection & Metrology Integrators
- ✅ MIC6 optical base plates (Ra < 0.2μm, flatness < 0.01mm) for a German wafer inspection OEM
- ✅ Granite stage assemblies with embedded alignment holes for a Japanese metrology group
- ✅ Titanium sensor brackets for an Israeli CD-SEM equipment builder
- ✅ SUS316L vacuum chambers for defect review systems exported to the USA
We support both build-to-print and co-design partnerships, helping customers optimize from prototype to series production.
✔ Why Semiconductor Metrology Brands Choose Our CNC Services
- 🏭 Over 20 years focused on ultra-precision machining
- 🎯 Expertise in flatness-critical, motion-critical, and vacuum-grade assemblies
- 🧼 Cleanroom-compliant finishes, ultrasonic cleaning, and Class 1000 packaging
- 🌍 Exported to over 30 countries across Asia, Europe, and North America
- ⚙️ Engineering support from concept to final inspection
📐 Let’s Help You Measure the Future — One Micron at a Time
Whether you’re building an overlay metrology platform, a vacuum inspection chamber, or a next-gen optics bed — we bring the machining precision that enables your measurement precision.
📧 Send your drawings today and receive a technical consultation within 24 hours.